发明名称 PROBE CARD FOR IC TESTER
摘要 PROBLEM TO BE SOLVED: To provide a probe card for zero insertion force connector type IC tester superior in electrical characteristics. SOLUTION: This probe card 2 for IC tester has one major surface arranged with a plurality of pin-like contacts 211 coming into electrical contact with an object to be tested and connected electrically with the test head substrate 11 of an IC tester. One 22a of a plurality of zero insertion force connectors which are connected electrically with the pin-like contacts 211 is located at a substantially radial position from the position where the pin-like contact is provided.
申请公布号 JP2000028640(A) 申请公布日期 2000.01.28
申请号 JP19980191310 申请日期 1998.07.07
申请人 ADVANTEST CORP 发明人 SUGA KAZUNARI
分类号 G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R1/073
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