| 摘要 |
PROBLEM TO BE SOLVED: To enable an operating time of a prescribed pneumatic actuator used in a substrate processing device to be easily and accurately measured. SOLUTION: A control 10A, which moves the working member 2A of a pneumatic actuator 1A from a movement starting position to a movement terminating position when actuating signals are inputted, is provided in a unit A comprised in a substrate processing equipment. An operating time measuring means, which measures the actual operating time of the pneumatic actuator from the time when actuating signals are inputted to the time when the working member 2A is detected by position detectors 6A and 7A provided at the movement terminating position, is provided to the control 10A, and a display means 11A which indicates the actual operating time is connected. The display means 11A displays also the target time of an operating time.
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