STAGE DEVICE, EXPOSURE DEVICE USING THE SAME, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To display a high movement precision by equipping a stage device with a 1st driving mechanism which generates a thrust for moving a stage in a specific direction and another 2nd driving mechanism and providing a force generating mechanism which generates a force to be applied at least in a specific direction to the 2nd driving mechanism when the 2nd driving mechanism is driven. SOLUTION: A current is supplied to a screw driving motor 13 to accelerate a stage 1. The torque of a feed screw 11 is converted into a guide-directional thrust by a nut 12 to accelerate the stage 1 to reach a desired speed through a recessed member 16 fixed to the stage 1. At this time, a current is supplied to the coil 24 of a bipolar linear motor 20 to generate a thrust nearly equal to the thrust that the feed screw system 11 transmits the stage. Consequently, the nut 12 and recessed member 16 are brought into contact with each other while the stage 1 is accelerated so that position control and speed control by the bipolar linear motors 20 provided on both the sides of the stage 1 will be effective even when the force needed to accelerate the stage 1 is transmitted to the stage 1.