| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method, for the inspection of a semiconductor device, wherein even the semiconductor device which is favorable in terms of cost and which comprises many functional blocks can be inspected simultaneously. SOLUTION: In an apparatus, an output signal from a semiconductor device 100 comprising a plurality of functional blocks 110, 120 is inspected. In the apparatus are provided an input-signal oscillator 210 which gives a prescribed input signal to the respective functional blocks 110, 120 in such a way that output signals at different frequencies can be obtained from the respective functional blocks 110, 120, an adder 240 which adds the outputs signals from the respective functional blocks 110, 120, a frequency-spectrum conversion device 260 which converts an added signal into a frequency spectrum and a display device 270 which displays the converted frequency spectrum.
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