| 摘要 |
PROBLEM TO BE SOLVED: To provide a load balance controller capable of evenly impressing a load even if the parallelism between both sides of a sheetlike product such as BGA(ball grid allay), etc., is dispersed. SOLUTION: A goniostage 17 connects freely lockably an upper plate 1 with a lower plate 2 while the rotary center thereof is located on the center of the lower plate 2. On the other hand, three each of load cells are evenly arranged on the lower plate 2 in three ways centered on the rotary center. In such a constitution, the load cells 18, 19, 20 are vertically shifted by a cam follower holder 13 abutting against respective measuring parts to make an eccentric cam 9 turn by a torque motor 3 so that load cells 18, 19, and 20 may be pushed to tilt the lower plate 2 for fluctuating the loads upon the load cells 18, 19, and 20. Finally, the cam follower holder 13 is vertically shifted for equalizing the whole measured value of the load cells 18, 19, and 20 thereby making the lower plate 2 feasible of pressurizing a product in evenly distributed load.
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