发明名称 SEMICONDUCTOR ALIGNER AND METHOD OF PRODUCING DEVICE
摘要 PROBLEM TO BE SOLVED: To minimize driving counts for a masking blade and enable order of shot to be calculate by grouping adjacent shots of exposable shots without driving the masking blade for continuous exposure. SOLUTION: The smallest numbered shot is used as a current shot, the amount of a masking blade driving is obtained for any shots in four, or top, bottom, right and left directions adjacent to the current shot (step F9-S1). If there is a shot with the same amount of the masking blade driving as the current shot among previously obtained shots in the four directions (step F9-S2), the current shot is also added to a group to which the shot with the same amount of the masking blade driving belongs (step F9 S3). If the shot is grouped for all of the directions, any shot information are obtained using the next numbered shot as the current shot.
申请公布号 JP2000031029(A) 申请公布日期 2000.01.28
申请号 JP19980207088 申请日期 1998.07.08
申请人 CANON INC 发明人 KAWAMURA KEIICHIROU
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/20
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