| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase the environment resistance and to enhance the reliability by forming wall surfaces which interrupt the atmosphere and water on the periphery of a body, in order not to discharge an SF6 gas being used in the apparatus into the atmosphere. SOLUTION: Wall surfaces 2 interrupt the atmosphere and water perfectly, and the joints of the wall surfaces have also construction which keeps airtightness. Consequently, the inside of the wall surfaces is perfectly separated from outside air and water. An apparatus 3 monitors the components of the air inside the wall surfaces, and outputs signals of that monitored data. When an SF6 gas exists in the air inside the wall surfaces, an apparatus 4 collects the gas. So, the apparatus 3 diagnoses that the SF6 gas is leaking, on the occasion of filling an apparatus 1 with an SF6 or collecting the gas, or when the SF6 gas leaks by a trouble of the apparatus 1. Besides, the SF6 gas having leaked is not discharged to the outside of the wall surfaces 2 by the effect of the wall surfaces 2, confined inside the wall surfaces 2, and collected perfectly by the apparatus 4.</p> |
