摘要 |
PROBLEM TO BE SOLVED: To make the adjustment easier and processes simpler at the time of manufacturing a magnetic element having magnetic layers and, at the same time, to make the quality of the element uniform by forming the magnetic layers in such a way that percentages composition of the layers are made substantially equal to each other, but at least either one of their coercive forces and anisotropy are made different from each other. SOLUTION: The substrate 1 of a magnetic element is made of glass and the first and second magnetic layers 2 and 3 of the element are formed by the sputtering method by using permalloy containing iron and nickel at a ratio of about 45:55 as a target material. In order to make the first and second magnetic layers 2 and 3 have different prescribed coercive forces though the layers 2 and 3 are formed of the same material, the first layer 2 is formed under an argon gas pressure of about 0.3 Pa and the second layer 3 is formed under another argon gas pressure of about 0.5 Pa. In addition, the formation of the magnetic element is not limited to the sputtering method, but the vacuum evaporation method, plating method, and CVD method can also be applied.
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