| 摘要 |
PROBLEM TO BE SOLVED: To form a thin film at an increased rate and to reduce the cost by specifying the volume content of a monoclinic phase in a zirconium oxide-base sputtering target. SOLUTION: An aq. soln. of chlorides, sulfide, nitrates or oxychlorides of zirconium and a group IIa element of the Periodic Table other than Be or a group IIIa element or a soln. of alkoxides, other salts or complexes is mixed and a uniformly mixed powder is obtd. by evaporating the solvent or carrying out thermal decomposition. In other way, powders of oxides, carbonates or other salts of zirconium and a group IIa element of the Periodic Table other than Be or a group IIIa element are uniformly mixed with a ball mill or the like. The resultant uniformly mixed powder is filled into a metallic mold and uniaxially pressurized or it is filled into a rubber bag and subjected to isostatic pressing to form a compact and this compact is heat-treated to obtain the objective sputtering target contg. <=30 vol.% monoclinic phase. |
