SEMICONDUCTOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor having good temperature characteristics, in which thermal expansion/shrinkage due to temperature fluctuation is not shifted on to a diaphragm part. SOLUTION: This semiconductor acceleration sensor is equipped with a silicon wafer 2 on which a diaphragm part 21 and a wafer outer circumferential frame part 23 are formed. The diaphragm part 21 is bonded with a mass part 24 and provided with a base 1 made of a material other than silicon. A joint part 3 between the silicon wafer 2 and the base 1 is formed at a part of the entirety of the wafer outer circumferential frame part 23 and a base outer circumferential frame part 12.