发明名称 IMAGE SENSOR HAVING SELF-ALIGNED SILICIDE FILM
摘要 PROBLEM TO BE SOLVED: To provide a CMOS(complementary metal oxide silicon) image sensor which can perform high-speed operations and performs a self-alignment silicide step while minimizing the change of existing operations. SOLUTION: A CMOS image sensor includes a photosensitive area, on which embedded photodiodes(BPD) are formed, photodiodes, multiple transistors which are electrically coupled, gates exclusive of the photosensitive area, a silicide film 325 formed on a high-density diffusion area and multiple insulating patterns provided through patterning of an insulating layer. The multiple insulating patterns include the insulating spacers formed on sidewalls of gates, which are given to each of the multiple transistors and protective layers formed on the photosensitive area in the gates, on the sidewalls of the adjacent gates and on the photosensitive area.
申请公布号 JP2000031449(A) 申请公布日期 2000.01.28
申请号 JP19990184157 申请日期 1999.06.29
申请人 HYUNDAI ELECTRON IND CO LTD 发明人 PARK SANG-HOON
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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