RUBBING TREATMENT DEVICE, METHOD OF RUBBING TREATING, RUBBING CLOTH AND MANUFACTURE OF LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To efficiently perform rubbing treatment and to suppress unevenness of rubbing treatment due to a difference in level of a substrate to be treated. SOLUTION: A rubbing roller 5 consists of a rubbing cloth 8 having planted pile which is wound round an outside circumferential surface of a rotary roller 7. The rubber roller 5 is brought into contact with a film surface to be treated of a substrate to be treated 1 which is mounted on a stage 21 and a rubbing treatment is carried out by relatively moving the substrate 1 and the roller 5. A direction 13 of a rotating shaft of the rubbing roller is inclined with respect to a direction 20 orthogonal to a direction of movement of the substrate to be treated about an edge 6a of a rotating shaft 6 of the roller as a reference. A direction 14 orthogonal to a direction of a side by side pile arrangement 12 of the rubbing cloth 8 is inclined with respect to the direction 13 of the rotating shaft of the rubbing roller 5 toward a direction 10 of a rotation of the roller about the edge 6a of the rotating shaft of the roller 6. An angleθ1 formed by a direction 11 orthogonal to the direction of the rotating shaft of the roller and the direction of the side by side pile arrangement 12 is in a range 20 deg.<=θ1<=40 deg..