发明名称 HOLDING TABLE FOR MATERIAL TO BE WORKED
摘要 <p>PROBLEM TO BE SOLVED: To eliminate the need for complicated work such as the exchange of a holding part and the attachment/detachment of a tape to/from a material to be worked, by forming the holding part which is integrated with a table body and absorbs/holds the material to be worked of a semi-hard member where many fine pores are formed. SOLUTION: A holding part 11 is formed of the semi-hard member of synthetic resin, carbon and ebonite. The upper face is formed in a planar form and has many fine pores in a vertical direction. A table body 12 is provided with a storage part 13 storing the holding part 11 at an upper part and is provided with a tube part 14 connected to a suction source generating suction force for holding a material to be worked at a lower part. The holding part 11 and the table main body 12 are integrated by storing the holding part 11 in the storage part 13 of the table body 12. Thus, suction force generated from the suction source is supplied to the surface of the holding part II through the tube part 14 and the fine pores.</p>
申请公布号 JP2000031098(A) 申请公布日期 2000.01.28
申请号 JP19980200955 申请日期 1998.07.15
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/683;H01L21/301;H01L21/68;(IPC1-7):H01L21/301 主分类号 H01L21/683
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