STAGE DEVICE, EXPOSURE DEVICE USING THE SAME, DEVICE MANUFACTURING METHOD, AND STAGE CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To establish a stage control in a short time by inputting a command value to an amplifier and driving a stage when a 1st control system is switched to a 2nd control system by switching a 1st and a 2nd driving mechanisms. SOLUTION: A position command outputted from a position pattern generator 1 is inputted to the both of a motor control system 2 as a 1st control system and a position control system 3 as a 2nd control system. When the motor control system 2 which controls a motor being a 1st driving mechanism is switched to the position control system 3 which controls a linear motor being a 2nd driving mechanism, a command value corresponding to the position generated at the time of driving the stage by the motor or the deviation in speed is inputted to the amplifier 6 for the linear motor to drive the stage and then, the position control system 3 controls the linear motor. Consequently, the stage control can be established in a short time.