| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing method of a substrate after the planarization process of a testing system. SOLUTION: The planarity between the surface of a testing system (20) such as a bottom face of a chuck (16) (or substrate 17) and an interface (28) or an inspection head (22) is checked before testing a substrate. A measuring tool having a sensor is arranged on the chuck of the testing system (20). The distance between the sensor and the surface inside the testing system is measured by the sensor. The surface is relatively flat. The sensor is separated from the surface during the measurement. The measuring tool is removed from the chuck. After removing the measuring tool, the substrate is arranged on the chuck to be tested using a testing system. Otherwise, more than two sensors can be applied. Furthermore, if the sensor 66 is integrated with the chuck 16, interface 28 or inspecting head 22, any discrete measuring tool can be eliminated. Furthermore, this method can be automated.
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