| 摘要 |
PROBLEM TO BE SOLVED: To measure the geometric feature parameters such as geometric tolerances of a minute object to be measured with pores and grooves of 100μm or less. SOLUTION: As bringing a probe 7 into contact with an object 4 to be measured from a predetermined direction under a measurement device coordinate system, a three-dimensional measuring device 1 acquires the three-dimensional coordinate data of the contact point. A data computing unit 100 performs coordinate transformation from the measurement device coordinate system to a reference coordinate system on the three-dimensional coordinate data through the use of the equation P0=R.Pm when R is a coordinate transformation matrix formed of a plurality of elements in four rows and four columns, Pm is the three-dimensional coordinate data acquired by the three-dimensional measuring device 1 in the measuring device coordinate system, and P0 is the three- dimensional coordinate data of the object 4 in the reference coordinate system.
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