| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic circuit for sputtering which can economically and easily be manufactured and makes it easy to adjust magnetic field parallelism after assembly. SOLUTION: This circuit consists of columnar magnets 1 which have positioning grooves on their outer peripheries along the length and are magnetized radially, a frame 3 which has storage holes for storing the columnar magnets 1 and positioning grooves provided adjacently to the storage holes, and positioning pins which are inserted into gaps formed of both grooves to position the columnar magnets 1.
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