| 摘要 |
PROBLEM TO BE SOLVED: To properly pattern a liquid crystal display device constituting film, such as ITO(indium tin oxide) film, etc., formed on a glass substrate by using a resist pattern. SOLUTION: Thermal damages, such as scorching, etc., of a resist is reduced by preventing bouncing of the heat radiated from a glass substrate (substrate to be etched) 4 which carries a resist pattern, a liquid crystal device constituting film, etc., on its surface to the substrate 4 by absorbing the heat on the side of an upper electrode 2a which constitutes a dry etching device plate by coating the electrode 2a with an Ni oxide film 9b, etc., made of a material having high heat absorption.
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