| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an orientation flat aligning device which is capable of properly and efficiently aligning a semiconductor substrate, and restraining it from moving up and down. SOLUTION: A first aligning roller 130 and a guide member 150 are arranged on the underside of a carrier 110 corresponding to the edges of the orientation flat 120A of a semiconductor substrate 120 at a lower aligning position, and a second aligning roller 140 is arranged at a point intermediate between the aligning roller 130 and the guide member 150. The first aligning roller 130 is rotated, and the semiconductor substrate 120 is rotated at a lower aligning position. Thereafter, the second aligning roller 140 is moved up and rotated in the direction opposite to that in which the first aligning roller 130 rotates, the semiconductor substrate 120 that could not be aligned by the first aligning roller 130 is rotated, and the semiconductor substrate is surely moved to a lower aligning position. Thereafter, the second aligning roller 140 is further moved up and rotated by a prescribed angle, and the semiconductor substrate 120 is rotated to an optional position.</p> |
