| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a semiconductor optical crystal element, in which the semiconductor optical crystal element provided with a three- dimensional refractive-index modulation structure or a two-dimensional refractive-index modulation structure to be operated in the order of the wavelength of light can be manufactured easily without making a hole. SOLUTION: In a manufacturing method for a semiconductor optical crystal element S provided with a refractive-index modulation structure, the reflactive-index modulation structure is a three-dimensional refractive-index modulation structure 30 which is constituted in such a way that at least a process, in which the laminated structure 2 of a first compound semiconductor layer 21 containing Al and a second compound semiconductor layer 22 not containing Al is grown on a substrate 1, is performed, and that an oxidation process in which only Al situated just under a prescribed place in the first laminated compound semiconductor layer 21 containing Al is oxidized vertically and selectively is performed, or a three-dimensional refractive-index modulation structure which is constituted in such a way that a process, in which the laminated structure 2 of the first compound semiconductor layer 21 containing Al and the second compound semiconductor layer 22 not containing Al is changed into a mixed crystal, is performed before the oxidation process. |
