METHOD FOR ARRANGING PARTICLE OF SPECIFIED SPECIES IN SOLID AND RESULTING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To form a dielectric layer in a semiconductor region by forming a compound layer of substrate composition and a compound layer containing a specified species sequentially on a substrate and causing chemical reaction in the compound layer containing specified species with gas thereby taking particles of the specified species into the compound layer of substrate composition. SOLUTION: A solid 10 comprises a substrate 12(of silicon, for example), a coating layer 14 on the substrate 12 and an interface 16 between them. The substrate 12 is composed of a compound S and the layer 14 is composed of SW of sub-compounds S and W. A layer 18 of a compound YZ is formed on the layer 14. The compound YZ is composed of sub-compounds Y and Z. Gas containing a compound X is present above the surface 22 of the solid 10. A new compound XY is produced as a chemical reaction product and particles of species Z are discharged. The particles of species Z enter into the layer 14. Since the quantity of species being taken in can be controlled more accurately, formation of a dielectric can be improved.