发明名称 SEMICONDUCTOR MANUFACTURING DEVICE AND DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To monitor an arbitrary sequence by providing a means wherein a combination of an operation state for each unit of a manufacturing device and illumination and flickering pattern of display lamps is inputted as a parameter for registration as a combination table, and a means for turning on or flickering a display lamp according to operation state. SOLUTION: When a operator inputs illumination/flickering pattern, a console part 80 stores it in a device state housing part (housing part) 160 while sends at least one illumination/flickering state of a display lamp of unit parts 30-60 and 90 to a main unit 70. The unit parts 30-60, when an error occurs or in a state of each sequence, transmits it as an event or an error code to the main unit part 70. The on-line unit part 90 transmits an illumination pattern to the main unit 70 by way of the console part 80. The main unit 70 selects a transmitted each illumination/flickering pattern out of the housing part 160 and transmits it to a signal processing part 130, when each illumination part 120-150 carries out.
申请公布号 JP2000030999(A) 申请公布日期 2000.01.28
申请号 JP19980210304 申请日期 1998.07.10
申请人 CANON INC 发明人 IGAI HIROSHI
分类号 H01L21/677;H01L21/02;H01L21/027;H01L21/68;(IPC1-7):H01L21/02 主分类号 H01L21/677
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