| 摘要 |
PROBLEM TO BE SOLVED: To easily, speedily and accurately repair a defect (wire breaking, detect in conduction, etc.), generated on a microcircuit pattern such as an address electrode pattern of a flat panel display (plasma display panel, liquid crystal display, etc.), and an LSI circuit pattern on a silicon wafer. SOLUTION: This transfer plate 7 formed by having a conductive film adhere to one surface of a substrate, which transmits almost all of a laser beam is put on a circuit pattern having a defect to be repaired so that the conductive film faces the pattern, and the transfer plate 7 is irradiated with a laser beam B5 from behind so as to have the conductive film sputtered and transferred on the transfer plate 7 toward the defect place on the circuit pattern. |
