ILLUMINATING REGION SETTING DEVICE AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To prevent contamination sticking on the backside of a reticle blind and to prevent an image of the contamination from being transferred to a photosensitive substrate. SOLUTION: The illuminating region for setting device 11 which has a light- shielding part 44, cutting off at least part of a beam B, formed on the top surface side of a transmission part 43 transmitting the beam B and sets a region to be lightened with the beam B by using a light-shielding part 44 is provided with cover plates 37 and 41 forming closed spaces 38 and 42 as specific spaces on the reverse surface side of the transmission part 43.