| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a photoelectric conversion element which can prevent the short circuit between the first electrode and the second electrode by simple process, concerning the manufacture of a photoelectric conversion element. SOLUTION: This manufacture includes a process of forming the first electrode 2 on an insulating substrate 1, a process of forming a photoelectric conversion film 3 on the first electrode 2, a process of forming an interlayer insulating film 4 so as to cover the first electrode 2 and the photoelectric conversion film 3 exclusive of the top of the photoelectric conversion film 3 to serve as the contact section with the second electrode 5, a process of dry-oxidizing the whole substrate where the first electrode 2, the photoelectric conversion film 3 and the interlayer insulating film 4 are made, and a process of forming the second electrode 5 having light permeability on the interlayer insulating film 4 and the photoelectric conversion film 3.
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