发明名称 THIN-FILM TRANSISTOR AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a thin-film transistor having a good drain current-gate voltage characteristic and a manufacturing method thereof. SOLUTION: A channel layer 14 formed on a base substrate 10, where the taper angle of the section of the end part is 10-45 deg., a gate electrode 18 which is formed on the base substrate 10 and channel layer 14 and intersects the channel layer 14, and source/drain regions 22 formed on the channel layer 14 at both sides of the gate electrode 18 are constituted.
申请公布号 JP2000031493(A) 申请公布日期 2000.01.28
申请号 JP19980202099 申请日期 1998.07.16
申请人 FUJITSU LTD 发明人 HORI TETSUO;OHORI TATSUYA
分类号 H01L29/786;H01L21/336;(IPC1-7):H01L29/786 主分类号 H01L29/786
代理机构 代理人
主权项
地址