发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE OF SUBSTRATE FOR MOUNTING SEMICONDUCTOR ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a laminated structure and a method for manufacturing a substrate for a semiconductor element, by which the manufacturing cost can be reduced and the wiring density can be increased. SOLUTION: A method for manufacturing a substrate for mounting a semiconductor element includes a base metal arranging step for providing base metal foil 21 which becomes a base on the surface 20a of a jig 20 having surface flatness, a laminating step for forming thin film metallic conductor layers 24A and 24B and insulating layers 22A and 22B on the foil 21 through a photolithography process, and an outside connecting terminal forming step for removing the jig 20 after the laminating step and, at the same time, forming outside connecting terminals 29 by patterning the foil 21.
申请公布号 JP2000031317(A) 申请公布日期 2000.01.28
申请号 JP19980197592 申请日期 1998.07.13
申请人 FUJITSU LTD 发明人 MINAMIZAWA MASAE;KANWA MASARU
分类号 H01L23/12;(IPC1-7):H01L23/12 主分类号 H01L23/12
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