发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To adjust input/output capacitance of a semiconductor device meeting the maximum and minimum standards or a customer's request. SOLUTION: On the main surface of a semiconductor substrate 1, a thick silicon oxide film 2 which functions as an element isolation region is formed and a first electrode 6 is formed on the silicon oxide film 6 in a peripheral circuit region. The first electrode 6 is formed simultaneously with a gate electrode 4 of a MISFET Qs for memory cell selection. In addition, the first electrode 4, the substrate 1 which is a second electrode, and silicon oxide film 2 held between the electrode 6 and substrate 1 constitute a parallel plate capacitance element CA. Moreover, the first electrode 6 is connected electrically connected to a bonding pad BP of a third-layer wiring M3. The selection whether or not the electrode 6 is connected to the bonding section BP1 of the bonding pad BP is performed, by changing the pattern of the metal switch section BP2 of the bonding pad BP.
申请公布号 JP2000031415(A) 申请公布日期 2000.01.28
申请号 JP19980200276 申请日期 1998.07.15
申请人 HITACHI LTD;HITACHI ULSI SYSTEMS CO LTD 发明人 INOUE YOSHIHIKO;YOSHIOKA HIROSHI;KINO KAZUHISA;OHARA KAZUAKI;MISHIMA MICHIHIRO
分类号 H01L21/3205;H01L21/8234;H01L21/8242;H01L23/52;H01L27/088;H01L27/10;H01L27/108 主分类号 H01L21/3205
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