| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray mask which is equipped with a circuit pattern for transfer, having high position precision and can be manufactured through a simplified manufacturing process and the manufacturing method for the mask. SOLUTION: This method for manufacturing an X-ray mask, having a base member 1 and an X-ray absorber 3 formed on the base member 1 and a mask layer 4, is formed on the X-ray absorber 3. A position detection member 31 including a position reference mark 8 is fixed to the base member 1. While the position reference mark 8 is used to detect the position of the mask layer 4, a mask pattern is drawn on the mask layer 4.</p> |
