HIGH THROUGHPUT ORGANOMETALLIC VAPOR PHASE EPITAXY (OMVPE) APPARATUS

摘要

A cold wall reactor (10) having inner (14) and outer (12) walls defining an annular reactor cell (16). A susceptor (52) is rotatably mounted in the cell (16), and received wafers (53) to be treated by gases flowing axially throug h the cell (16). The outer wall (10) of the reactor is normally cooled, but is heated by a suitable furnace (210) to provide a hot wall reactor when cleani ng of the cell (16) is required.