Multi-column lithography system using charged particle radiation-like electron rays has control unit for adjusting waiting time for each intensifier connected to main deflectors

摘要

Control unit for adjusting waiting time regulates adjustable waiting time supplied by each intensifier connected to the main deflectors (30) to implement coincident irradiation within the columns. Charged particle radiation transfers multiple columns as a sample onto an exposed sample piece, while a charged particle stream is deflected in compliance with data from data store (45) for an irradiation sample and then directed over the exposed sample piece.