| 摘要 |
<p>An apparatus and method for determining characteristics of a sample material utilize evanescent microwaves produced by one or more microstripline resonators. A plurality of microstripline resonators can be arranged in an array on a substrate (32) which can be passed across the surface of a sample to quickly determine characteristics of the sample material. Also, different sized or shaped resonators (36) can be arranged in an array to determine characteristics of a sample material at different depths within the material. Further, different resonator tip shapes (38) can be used to account for variations in a separation distance between the array and a sample material. A device employing the apparatus and methods can be used to determine electrical spin transitions in a sample material, to determine dopant profiles in a semiconductor, and to determine carrier lifetime or activation energies of a semiconductor substrate.</p> |
