| 摘要 |
A sample stage (12) of a precision sample positioning system (10) includes a sample plate (30) supported above a base plate (26) on a plurality of slider assemblies (200). Each slider assembly (200) includes a base slider (202) secured to a surface of the base plate (26) and a stage slider (204) secured to the sample plate (30). Each slider (202, 204) is made from common material. The common material possesses the characteristic of not having a yield point, and having a sufficiently high strength so as to permit sliding without surface degradation. |
