| 摘要 |
<p>A fluororubber composition comprising (a-1) a nonperfluorinated fluororubber and (b-1) a multi-segment fluoropolymer which comprises at least one elastomeric fluoropolymer segment and at least one nonelastomeric fluoropolymer segment and in which at least 90 mol % of the structural units constituting each segment are accounted for by perhaloolefin units. The composition is usable as a clean sealing material for semiconductor production apparatuses, without containing a filler.</p> |
