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发明名称
NASSAETZUNGSVERBINDUNG FUER HALBLEITER MIT AUSGEZEICHNETEN BEFEUCHTUNGSEIGENSCHAFTEN
摘要
申请公布号
DE69418458(T2)
申请公布日期
2000.01.27
申请号
DE19946018458T
申请日期
1994.02.02
申请人
DAIKIN INDUSTRIES, LTD.
发明人
ISHII, MASAO;HOSOMI, TOMOHIRO;MARUYAMA, SHIGERU;ITANO, MITSUSHI
分类号
C09K13/10;H01L21/306;H01L21/311;(IPC1-7):H01L21/306;H01L21/308;C11D1/00
主分类号
C09K13/10
代理机构
代理人
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