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发明名称
IC-Test-Gerät
摘要
申请公布号
DE69605757(D1)
申请公布日期
2000.01.27
申请号
DE19966005757
申请日期
1996.07.04
申请人
SINANO ELECTRONICS CO., LTD.
发明人
ITOH, MASATO
分类号
G01R31/26;B25J15/06;F24F5/00;G01R31/28;H01L21/687;(IPC1-7):G01R31/316;H01L21/00
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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