ASSEMBLING STRUCTURE OF MICROMANIPULATOR WITH FORCE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an assembling structure of a micromanipulator with a force sensor capable making sensor output from the force sensor accurate by restraining influence of assemblig time stress of the micromanipulator when assembling the micromanipulator in a manipulator main body. SOLUTION: The handling part 11 of a micromanipulator is formed in a tube shape, and a force sensor 12 is arranged in the central outer periphery. The central thick part 14 of the force sensor 12 is connected to a base stand 13 by the thin support part 16. A strain sensor composed of the force sensor 12 formed by diffusion is arranged on the upper side of the thin support part 16. A pedestal 20 is adhered to the reverse of the base stand 13 so that the pedestal 20 is fixed to the locking step part 23 of a cover 22 by being fastened/ fixed by a reverse pressing plate 24. The cover 22 is installed n a manipulator main body 30.