COMPONENT BUILT IN OPTICAL DEVICE AND HOLDER

摘要

PURPOSE: A component is provided to improve an exactness of a location setting of an optical device with reduced an external influence. CONSTITUTION: An optical device is coupled to a middle ring through a plurality of junction plates. The middle ring is coupled to a housing through a repeat control member or a passive decoupler, or/and a holder for coupling other holder. A component including the optical device has a maximum loading reduction characteristic and a DUV-resistor characteristic. The component is used for a projection exposure equipment.