SEMICONDUCTOR MEMORY CELL, SEMICONDUCTOR MEMORY ARRAY AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A semiconductor memory cell is provided to reduce a junction capacitance and a dopant concentration in a device. CONSTITUTION: The semiconductor memory cell comprises a storage capacitor(12) and a transfer element(22). The storage capacitor(12) is formed in a trench(14). The trench(14) is formed etching a substrate(11) inward. The transfer element(22) is extended along a many part of an arc around outside trench, and is formed in an electrically-isolated mesa region(18). And, the transfer element has a contact part connecting electrically and mutually with the trench.