TRENCH CAPACITOR HAVING AN INSULATING COLOR AND METHOD THEREOF

摘要

PURPOSE: A trench capacitor and method thereof are provided to easily control contacting by using an insulating color. CONSTITUTION: The trench capacitor(160) used for memory cell(100) comprises a trench(108) having an upper region(109) and a lower region(111); an insulating color(168) formed on the upper region of the trench; a buried well(170) connected to the lower region(111) of the trench(108); a buried plate(165) used as external capacitor electrode; a dielectric layer(164) for covering the lower region of the trench and the insulating color(168); a conductive trench pillar(161) to fill into the trench(108) and used as internal capacitor electrode; and a buried contact(250) formed in a substrate(101), wherein the buried contact(250) is formed by implanting and plasma doping. A tunnel layer(205) is formed at boundary of the buried contact(250).