| 摘要 |
PURPOSE: A method for manufacturing a thin film actuated mirrors array in an optical projection system is provided to simplify a manufacturing process by forming a bias conductive line and a post at the same time as a structured two layers. CONSTITUTION: The method for manufacturing a thin film actuated mirrors array comprising the step of: preparing a driving substrate (410) including a insulating substrate, MOS transistor, and a drain pad; forming a first sacrificial layer (490), which a support portion is formed on the driving substrate; forming an actuator (510), which a membrane (520), a lower electrode (450), a deformable layer (530), an upper electrode (550) and an Electro tube (565) are formed onto the first sacrificial layer and the support layer; forming a bias line (570) respectively between the actuators; forming an insulating layer (580), which the bias line and the upper electrode are exposed, and a window (585) are formed; forming the bias line and a post at the same time; removing the insulating layer; forming a second sacrificial layer (6000) having a planar surface onto the actuator and bias line, and which the posts are exposed; forming a mirror (610) onto the post and the second sacrificial layer; and removing the first and second sacrificial layer.
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