| 摘要 |
PURPOSE: A micro mirror device is provided to increase the reliability of micro mirror reset motion and to improve the contrast of the projected image. CONSTITUTION: The device comprises the arrays of micro mirror devices having substrate(104), rigid diffraction member(302,314,326) leaned on the substrate, spring separated to the rigid diffraction member and supported on the substrate. The spring(328) resist the diffraction of the rigid member when the member is diffracted and connected to the spring. In the device, the micro mirror device reflect the incident light selectively by the direction of controller electrically connected with the device, the reflected light can be utilized in the projection display system concentrated on image plane.
|
