| 摘要 |
PURPOSE: A thin film actuated mirrors array in an optical projection system is provided to apply a vacuum pressure on the flat plate for causing to a module of the thin film actuated mirrors array to be contacted. CONSTITUTION: The thin film actuated mirrors array comprising an active matrix (100) including a first metal layer (135), which a MOS transistor (120) is built-in and a plurality of a drain pad extended from a drain (105) of the transistor; a supporter (175) formed onto the surface fully of the active matrix (100); an actuator (210) formed onto the supporter, and including a lower electrode layer (180), a first and a second deformable layers (190, 191) and a first and a second upper electrode layers(200, 201); a mirror formed onto the actuator(210); and a flat plate(335) formed onto a rear surface of the active matrix and, which a plurality of vacuum holes for providing a substrate voltage to the surface thereof.
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