| 摘要 |
PURPOSE: A method of forming a metal wire is provided to previously form a metal oxide film between a metal conductive layer and a reflecting preventive film so as to prevent a metal ring defect. CONSTITUTION: The method comprises the steps of: forming a diffusion preventive film(20), a glue layer(30), a metal conductive layer(400) and a reflecting preventive film(50) in order so as to form a metal wire, performing a heat treating process so as to bury the metal wire into a contact hole. In the method, a metal oxide film is formed between the metal conductive layer and the reflecting preventive film. the metal oxide film is formed by a thermal oxidation. Thereby, a metal ring defect is prevented and a yield rate is increased.
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