| 摘要 |
PURPOSE: A method for manufacturing a thin film actuated mirrors array in an optical projection system is provided to improve a quality of image projecting on the screen by increasing a light efficiency of a induce light reflected by a mirror. CONSTITUTION: The method for manufacturing a thin film actuated mirrors array comprising the step of: providing an active matrix (200) including a first metal layer (235), which a MOS transistor is built-in and a drain pad extending from a drain of the transistor; forming and patterning a first sacrificial layer (260) onto the active matrix; forming a first layer, a lower electrode layer, a second layer and a upper electrode layer onto the first sacrificial layer, patterning the lower electrode layer, the second layer and the upper electrode layer and then forming an actuator(310); forming a supporter (175) including a first anchor and a second anchor by patterning the first layer; forming a second sacrificial layer(400) by using accuflo onto the supporter and the actuator; forming a hard mask(420) and then patterning the second sacrificial layer by using the hard mask; and forming a mirror(360) onto the patterned second sacrificial layer and the hard mask.
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