| 摘要 |
PURPOSE: A thin film actuated mirrors array in an optical projection system is provided to maintain clearly a surface of a mirror by completely removing a contact agent onto a actuator on removing a thin film. CONSTITUTION: The method for manufacturing a thin film actuated mirrors array comprising the step of: providing an active matrix (100) including a first metal layer (135), which a MOS transistor is built-in and a plurality of a drain pad extended from a drain of the transistor; forming a first layer, a lower electrode layer, a second layer and a upper electrode layer onto the first sacrificial layer, forming an actuator (210) by patterning the lower electrode layer, the second layer and the upper electrode layer; forming a supporter (175) supporting the actuator by patterning the first layer; forming a mirror(260) onto the actuator; exposing a plurality of the drain pad neighboring to the active matrix; and contacting onto the active matrix a thin film(330) coated with a contact agent(335) except for a portion of the mirror and then cutting the active matrix.
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