FINE CHANNEL MEMBER, FORMATION THEREOF, LIQUID EJECTOR AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To obtain a fine channel suitable for measuring the characteristics of gas or liquid. SOLUTION: A polysilicon film 2 is formed on a first silicon substrate 1 and implanted with impurities. A photoresist 3 is then patterned on the polysilicon film 2 and a barrier wall part 4 is formed by removing the polysilicon film 2 selectively in grid pattern. Subsequently, a silicon oxide film 5 is formed on the exposed part of the first silicon substrate 1 and the surface of the barrier part 4 thus forming a fine channel 6.