METHOD FOR MANUFACTURING A THIN FILM ACTUATED MIRROR ARRAY

摘要

PURPOSE: A method for manufacturing a thin film actuated mirrors array in an optical projection system is provided to easily remove a second sacrificial layer and to prevent occurrence of a void in a surface of a mirror by treating the second sacrificial layer by an aromatic solvent. CONSTITUTION: The method for manufacturing a thin film actuated mirrors array comprising the step of: providing an active matrix (100) including a first metal layer (135), which a MOS transistor is built-in and a drain pad extending from a drain of the transistor; forming and patterning a first sacrificial layer (160) onto the active matrix; forming a first layer, a lower electrode layer, a second layer and a upper electrode layer onto the first sacrificial layer, patterning the lower electrode layer, the second layer and the upper electrode layer and then forming an actuator(210); forming a supporter (175) by patterning the first layer; forming a second sacrificial layer(300) onto the supporter and the actuator and then patterning the second sacrificial layer; treating the second sacrificial layer by aromatic solvent; forming a mirror(260) onto the second sacrificial layer; and removing second sacrificial layer by wet etching method.