发明名称 Light source unit, optical measurement apparatus and exposure apparatus using the same unit
摘要 A laser light source unit generates second higher-harmonic waves or sum-frequency waves by using an external resonator. The light source unit has a wavelength converter which incorporates an external resonator. A modulator spatially modulates the output light from the converter, thereby removing speckle noise. An optical waveguide propagates the laser light from the modulator to a given optical apparatus. The wavelength converter, the modulator, and the optical waveguide are mechanically separated. Moreover, vibration isolating members are provided to inhibit vibrations. Thus, any change in the length of the resonator or the optical axis caused by external vibrations is prevented. Further, a speckle pattern generated in propagating through an optical fiber is eliminated.
申请公布号 US6018413(A) 申请公布日期 2000.01.25
申请号 US19980064325 申请日期 1998.04.22
申请人 SONY CORPORATION 发明人 OKA, MICHIO
分类号 G02F1/37;G02F1/35;(IPC1-7):G02F1/35 主分类号 G02F1/37
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