| 摘要 |
PURPOSE: A thin film actuated mirrors array in an optical projection system is provided to optimize a design of an active matrix by reducing a coupling effects between a gate line and a source line when reducing a size of a integrated circuit built-in an active matrix. CONSTITUTION: The thin film actuated mirrors array comprising an active matrix (100) in which a MOS transistor comprised of a gate (115), a source (110) and a drain (105) is built-in, including a gate line (133) contacted with the gate, a source line (134) contacted with source, an insulating layer (130) formed between the gate line and the source line, and a drain pad (132) contacted with the drain, which the gate line and the source line are formed as a layer each another; a supporter (175) formed onto the active matrix; an actuator(210) including a first deformable layer, a second deformable layer, and a second upper electrode; and a mirror(260) formed onto the actuator(210).
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